| Input Voltage | 380V 50Hz | 
| Input Power | 0.75 KW | 
| Air Pressure | 0.5~ 0.8MPa | 
| Air Consumption | 3L/min | 
| Copy Range | 90nm × 290nm | 
| Main-shaft Revolution | 11200r/min | 
| Copy-routing blade Diameter | φ5mm φ8mm | 
| Overall Dimension | 870mm × 700mm × 1500mm | 
| Weight | 220kg | 
| Input Voltage | 380V 50Hz | 
| Input Power | 0.75 KW | 
| Air Pressure | 0.5~ 0.8MPa | 
| Air Consumption | 3L/min | 
| Copy Range | 90nm × 290nm | 
| Main-shaft Revolution | 11200r/min | 
| Copy-routing blade Diameter | φ5mm φ8mm | 
| Overall Dimension | 870mm × 700mm × 1500mm | 
| Weight | 220kg |